Spectroscopic Ellipsometer
The Sentech SER 800 is a spectroscopic ellipsometer for non-destructive measurement of thin-film thickness and optical constants (refractive index n, extinction coefficient k). The SER800 system covers the 240–1050 nm wavelength range.
Measurement time can be as short as 30 ms; typical 300 ms for one spectrum with averaging.
Spot size is typically 2-3mm. Thickness accuracy is typically ~1 nm for 400 nm SiO₂ on Si; precision ~0.3 nm (1σ). Thickness range: 1 nm to 25 µm.
Recipe-based software, material libraries, manual mapping and automated analysis are included. Max sample size up to 6". Applications: semiconductor and dielectric films, optical coatings, photovoltaics R&D, quality control, and in-situ monitoring.
Features
- Wavelength range: 240–1050 nm
- Measurement time: from 30 ms; typical 300 ms per spectrum (with averaging)
- Spot size: typically 2-3 mm
- Thickness: 1 nm–25 µm; accuracy ~1 nm (e.g. 400 nm SiO₂/Si); precision ~0.3 nm (1σ)
- Refractive index resolution: down to ~2×10⁻³ (sample dependent)
- Max sample size: 6"
- Fixed stage, manual tilt and Z.
- Software: recipe-based operation, material libraries, automated analysis
