Reflectometer

The NanoCalc system is a spectroscopic reflectometry system designed for non-destructive measurement of thin film thicknesses and optical constants on common film stacks.

small unit, table top with control laptop PC, optical fiber head and sample mounting for wafers. Ocean optics spectrometer box.

Supports measurements across a broad spectral range, making it versatile for various material types and layer configurations. The system can analyze single-layer and multi-layer structures based on a reference sample.

Reservations & Training
Inventory ID:
ENG-N052
Manufacturer:
Ocean Optics
Model:
NanoCalc-XR
Year Installed:
2012
Section
Engineering
Room Number:
L5-D49
Open to External Use?:
Consultation
Operation:
User/Staff Operated
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Features

Spectral Range: 250 nm to 1050 nm Thickness measured range: 10 nm up to several µm Multi-Layer Analysis: up to 10 layers Angle of incidence 90° Sample size up to 4-inch wafers. Spot size 1 mm. Fast measurement <1s