Rapid Thermal Annealer

Tabletop rapid thermal annealer with near‑infrared lamp heating up to ~1200°C and ~50°C/s ramp rates in vacuum or controlled gas atmospheres.

table-top device with control panel on front - thermal annealing

Compact IR lamp furnace system (gold‑image) providing precise temperature control and fast thermal cycling for RTA processes such as dopant activation and annealing. Supports operation in vacuum, nitrogen or air for flexible thermal treatments on small samples.

Reservations & Training
Inventory ID:
ENG-N045
Manufacturer:
ULVAC
Model:
MILA-5000-P-N
Year Installed:
2013
Section
Engineering
Room Number:
Lab2-A645f
Open to External Use?:
Consultation
Operation:
User/Staff Operated
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Features

High speed heating (50°C/s), under Vacuum, gas, air. Precise temperature control.