Plasma Treatment System

The Atto system is a low-pressure plasma cleaner designed for applications such as surface cleaning, activation, etching, and sterilization.

Small unit with gas meters and round sample chamber, table-top system

The system generates a plasma field inside a small chamber using oxygen and/or argon process gases for applications such as cleaning organic contaminants, activating surfaces to improve adhesion, and modifying surface properties like wettability and chemical functionality.

Reservations & Training
Inventory ID:
ENG-N058
Manufacturer:
Diener Electronic
Model:
Atto
Year Installed:
2025
Section
Engineering
Room Number:
L5-D48
Open to External Use?:
Yes
Operation:
User/Staff Operated
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Features

  • Manual control with rotary switches
  • RF power source 10 to 300W at 13.56MHz with Auto matching
  • Electrodes located outside the vacuum chamber
  • Process pressure: 0.2 to 4mbar
  • Process gases: Ar, O2 with manual needle valves

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