Professor Shintake in his lab
Professor Shintake examines a premade, commercial silicon wafer. He stands behind a prototype of his last design for in-line, EUV lithography. Efforts are underway to make a prototype for his current in-line design for high-NA EUV lithography.
Date:
16 June 2026
Credit:
Andrew Scott, OIST
Copyright OIST (Okinawa Institute of Science and Technology Graduate University, 沖縄科学技術大学院大学). Creative Commons Attribution 4.0 International License (CC BY 4.0).