Professor Shintake in his lab

A scientist looks at a circular silicon wafer etched with circuitry, with his face reflected on the surface of the wafer. In the foreground, a glimpse of the hardware for in-line EUV lithography is visible.

Professor Shintake examines a premade, commercial silicon wafer. He stands behind a prototype of his last design for in-line, EUV lithography. Efforts are underway to make a prototype for his current in-line design for high-NA EUV lithography.

Date:
16 June 2026
Credit:
Andrew Scott, OIST
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