Field-Emission SEM
The Zeiss Merlin is a field-emission SEM built on the GEMINI column, providing sub-nanometer resolution and a wide range of detectors.
The OIST system is equipped with multiple detectors (broadly covering the catalogue options): In-lens SE (e.g. 0.8 nm at 15 kV, 1.4 nm at 1 kV), SE2/HE-SE2, In-lens EsB (energy-selective backscatter), BSD (angle-selective and 4-quadrant), EDS (energy-dispersive X-ray), EBSD and STEM. Accelerating voltage: 0.02–30 kV; probe current 3 pA–300 nA; magnification 12×–2,000,000×.
The stage is 5-axis motorized eucentric (X/Y 130 mm, Z 50 mm, tilt -3° to +70°, 360° rotation); max sample 500 g. Chamber is 330 mm diameter × 270 mm height. Features include local charge compensation for non-conductive samples, plasma cleaner, gas injection, and chamber scope. Applications: nanomaterials, semiconductor and device analysis, thin films, crystallography (EBSD), failure analysis, TEM sample preparation.
Features
- Electron source: Schottky thermal field emission (ZrO/W)
- Resolution: 0.8 nm at 15 kV (In-lens SE); 1.4 nm at 1 kV; 0.6 nm at 30 kV (STEM)
- Accelerating voltage: 0.02–30 kV; probe current: 3 pA–300 nA
- Magnification: 12× to 2,000,000×
- Detectors: In-lens SE, SE2, HE-SE2, In-lens EsB, BSD (AsB, 4Q), EDS, EBSD, WDX, STEM
- Stage: 5-axis motorized, X/Y 130 mm, Z 50 mm, tilt -3° to +70°, 360° rotation; max 500 g
- Chamber: 330 mm Ø × 270 mm height; charge compensation, plasma cleaner
