Mechanical Profiler
The Bruker Dektak Pro A is a stylus (mechanical) profiler for surface topography, roughness, and step height measurement. Vertical resolution is 1 Å (0.1 nm) or better; step-height repeatability is typically ~5 Å (0.5 nm). Scan length is up to 55 mm (stitchable to 200 mm); vertical range covers 5 nm–1 mm step heights. The system uses a low-inertia LVDT-based sensor (e.g. LIS-3) for high linearity and recalibration-free operation. Stylus force is selectable (e.g. 0.03–15 mg with N-Lite+ for sensitive surfaces). Stylus tip radius 12.5 µm standard. Stage: motorized XY (200 mm), motorized R-Theta; max sample typically 200 mm diameter, 50 mm thick. Vision64 software provides 2D/3D analysis, filtering, and roughness parameters. Applications: thin-film and etch depth metrology, lithography process control, surface roughness, stress and wafer bow, R&D and QA/QC.
Features
- Vertical resolution: 1 Å (0.1 nm); step repeatability ~5 Å
- Scan length: up to 55 mm (stitchable to 200 mm); vertical range 5 nm–1 mm
- Sensor: LVDT-based (e.g. LIS-3); low stylus force 0.03–15 mg (N-Lite+)
- Stylus: 12.5 µm radius standard;
- Stage: motorized XY 200 mm; Motorized R-Theta; max 200 mm Ø, 50 mm thick
- Software: Vision64; 2D/3D mapping, roughness (Ra, etc.), step height
