Equipment Analytical instruments Electronics fabrication Fieldwork General Laboratory Equipment Imaging Mechanical fabrication (-) Nanofabrication Scientific computing Sequencing Vivarium Facet Equipment Category Group 3D printing Backend equipment Characterization Deposition Etching Lithography (-) Nanofab sample preparation Ovens and Furnaces Sample preparation Facet Equipment Category External Use?YesConsultationNo - Any -Animal ResourcesBasic Lab SupportEngineeringEnvironmental Science and InformaticsInstrumental AnalysisMarine ScienceScientific Computing and Data AnalysisScientific ImagingSequencing Clear filters Advanced Maskless Aligner Maker: Heidelberg Instruments Model: MLA-150 The MLA 150 is a dual wavelength advanced maskless aligner which offers precise, high-speed photolithography with front and backside alignment for prototyping, and small-scale production. External Use: Yes | User/Staff Operated Automatic Dicing Saw Maker: DISCO Model: DAD323 The DISCO DAD322 is a precision dicing saw used to cut semiconductor wafers, glass, ceramics, and similar materials into smaller pieces, such as individual chips or devices. External Use: Consultation | User/Staff Operated Ball /Wedge Wire Bonder Maker: TPT Model: HB16 The TPT HB16 model is a Ball/wedge wire bonder that enables electrical interconnection between a device chip and package using a gold wire. External Use: Yes | User/Staff Operated Deep Reactive Ion Etching (RIE) Maker: Samco Model: RIE-400iPB The Samco RIE-400iPB is a dry deep etching system optimized for deep silicon etching utilizing Bosch process with high-aspect-ratio etching with excellent selectivity and minimal scalloping. External Use: Yes | User/Staff Operated Electron Beam Lithography Maker: Elionix Model: ELS-Boden 100 The Elionix Boden 100 is a state-of-the-art electron beam lithography system designed for high-resolution patterning of nanostructures. External Use: Yes | User Operated Fumehood Acid Maker: Oriental An acid-dedicated fume hood is designed to safely manage the handling of acids. External Use: Consultation | User/Staff Operated Fumehood HF acid Maker: Oriental An HF acid-dedicated fume hood is designed to safely manage the handling of hydrofluoric acid. External Use: Consultation | User/Staff Operated HF vapor etcher Maker: SPTS - KLA Model: Primaxx uetch The Primaxx HF Vapor etching system is a tool designed for the precise and selective removal of sacrificial silicon dioxide (SiO₂) layers in MEMS. External Use: Consultation | User/Staff Operated Micropipette Puller Maker: Sutter instruments Model: P-2000 CO2 laser-based micropipette puller for quartz, borosilicate and aluminosilicate capillaries, offering fully programmable, highly reproducible pulls. External Use: Consultation | User/Staff Operated Oxygen Plasma Cleaner Maker: SPI Model: Plasma Prep Ⅲ The Plasma Prep is a low-pressure oxygen plasma system used for cleaning or activation of surfaces. External Use: No | User/Staff Operated Plasma Enhanced Atomic Layer Deposition (PE-ALD) Maker: Samco Model: AD-800LP The Samco AD-800LP is a system designed for precise atomic-scale film deposition. It combines thermal and/or plasma-enhanced ALD capabilities, making it suitable for a wide range of materials, including oxides, nitrides, and conductive films. External Use: Yes | User/Staff Operated Plasma Treatment System Maker: Diener Electronic Model: Atto The Atto system is a low-pressure plasma cleaner designed for applications such as surface cleaning, activation, etching, and sterilization. External Use: Yes | User/Staff Operated Plasma-Enhanced Chemical Vapor Deposition (PECVD) Maker: Samco Model: PD-200NL The Samco PD-200NL is a Plasma-Enhanced Chemical Vapor Deposition (PECVD) system optimized for high-quality films deposition of silicon dioxide (SiO), silicon nitride (SiN) and amorphous silicon. External Use: Yes | User/Staff Operated Polisher / Grinder Maker: South Bay Technology Model: Model 900 The Model 900 is a manual system for grinding or polishing substrate. External Use: Consultation | User/Staff Operated Rapid Thermal Annealer Maker: ULVAC Model: MILA-5000-P-N Tabletop rapid thermal annealer with near‑infrared lamp heating up to ~1200°C and ~50°C/s ramp rates in vacuum or controlled gas atmospheres. External Use: Consultation | User/Staff Operated Reactive Ion Etching (RIE) Maker: Samco Model: RIE-200NL The Samco RIE-200NL is a dry etching system optimized for silicon-based materials like silicon dioxide (SiO), silicon nitride (SiN), or other nitride and oxide and some metals. External Use: Yes | User/Staff Operated Reflectometer Maker: Ocean Optics Model: NanoCalc-XR The NanoCalc system is a spectroscopic reflectometry system designed for non-destructive measurement of thin film thicknesses and optical constants on common film stacks. External Use: Consultation | User/Staff Operated Rheometer Maker: Anton-Paar Model: MCR302 Modular compact rheometer for rotational and oscillatory testing with air‑bearing drive and high torque sensitivity. External Use: Consultation | User/Staff Operated Pagination 1 2 Last page
Advanced Maskless Aligner Maker: Heidelberg Instruments Model: MLA-150 The MLA 150 is a dual wavelength advanced maskless aligner which offers precise, high-speed photolithography with front and backside alignment for prototyping, and small-scale production. External Use: Yes | User/Staff Operated
Automatic Dicing Saw Maker: DISCO Model: DAD323 The DISCO DAD322 is a precision dicing saw used to cut semiconductor wafers, glass, ceramics, and similar materials into smaller pieces, such as individual chips or devices. External Use: Consultation | User/Staff Operated
Ball /Wedge Wire Bonder Maker: TPT Model: HB16 The TPT HB16 model is a Ball/wedge wire bonder that enables electrical interconnection between a device chip and package using a gold wire. External Use: Yes | User/Staff Operated
Deep Reactive Ion Etching (RIE) Maker: Samco Model: RIE-400iPB The Samco RIE-400iPB is a dry deep etching system optimized for deep silicon etching utilizing Bosch process with high-aspect-ratio etching with excellent selectivity and minimal scalloping. External Use: Yes | User/Staff Operated
Electron Beam Lithography Maker: Elionix Model: ELS-Boden 100 The Elionix Boden 100 is a state-of-the-art electron beam lithography system designed for high-resolution patterning of nanostructures. External Use: Yes | User Operated
Fumehood Acid Maker: Oriental An acid-dedicated fume hood is designed to safely manage the handling of acids. External Use: Consultation | User/Staff Operated
Fumehood HF acid Maker: Oriental An HF acid-dedicated fume hood is designed to safely manage the handling of hydrofluoric acid. External Use: Consultation | User/Staff Operated
HF vapor etcher Maker: SPTS - KLA Model: Primaxx uetch The Primaxx HF Vapor etching system is a tool designed for the precise and selective removal of sacrificial silicon dioxide (SiO₂) layers in MEMS. External Use: Consultation | User/Staff Operated
Micropipette Puller Maker: Sutter instruments Model: P-2000 CO2 laser-based micropipette puller for quartz, borosilicate and aluminosilicate capillaries, offering fully programmable, highly reproducible pulls. External Use: Consultation | User/Staff Operated
Oxygen Plasma Cleaner Maker: SPI Model: Plasma Prep Ⅲ The Plasma Prep is a low-pressure oxygen plasma system used for cleaning or activation of surfaces. External Use: No | User/Staff Operated
Plasma Enhanced Atomic Layer Deposition (PE-ALD) Maker: Samco Model: AD-800LP The Samco AD-800LP is a system designed for precise atomic-scale film deposition. It combines thermal and/or plasma-enhanced ALD capabilities, making it suitable for a wide range of materials, including oxides, nitrides, and conductive films. External Use: Yes | User/Staff Operated
Plasma Treatment System Maker: Diener Electronic Model: Atto The Atto system is a low-pressure plasma cleaner designed for applications such as surface cleaning, activation, etching, and sterilization. External Use: Yes | User/Staff Operated
Plasma-Enhanced Chemical Vapor Deposition (PECVD) Maker: Samco Model: PD-200NL The Samco PD-200NL is a Plasma-Enhanced Chemical Vapor Deposition (PECVD) system optimized for high-quality films deposition of silicon dioxide (SiO), silicon nitride (SiN) and amorphous silicon. External Use: Yes | User/Staff Operated
Polisher / Grinder Maker: South Bay Technology Model: Model 900 The Model 900 is a manual system for grinding or polishing substrate. External Use: Consultation | User/Staff Operated
Rapid Thermal Annealer Maker: ULVAC Model: MILA-5000-P-N Tabletop rapid thermal annealer with near‑infrared lamp heating up to ~1200°C and ~50°C/s ramp rates in vacuum or controlled gas atmospheres. External Use: Consultation | User/Staff Operated
Reactive Ion Etching (RIE) Maker: Samco Model: RIE-200NL The Samco RIE-200NL is a dry etching system optimized for silicon-based materials like silicon dioxide (SiO), silicon nitride (SiN), or other nitride and oxide and some metals. External Use: Yes | User/Staff Operated
Reflectometer Maker: Ocean Optics Model: NanoCalc-XR The NanoCalc system is a spectroscopic reflectometry system designed for non-destructive measurement of thin film thicknesses and optical constants on common film stacks. External Use: Consultation | User/Staff Operated
Rheometer Maker: Anton-Paar Model: MCR302 Modular compact rheometer for rotational and oscillatory testing with air‑bearing drive and high torque sensitivity. External Use: Consultation | User/Staff Operated
