Mechanical Surface Profiler

The Dektak is a mechanical profiler to measure surface topography and roughness of the substrate with a resolution <1nm in Z.

Bruker dektak profiler

Surface mechanical profiler is a metrology instrument used to measure surface topography by scanning the sample's surface with a diamond-tip stylus. The tool maintains a constant stylus force as the sample stage moves the sample under the stylus tip to trace a profile or measure the surface roughness

Inventory ID:
ENG-N10
Manufacturer:
Bruker Ulvac
Model:
Dektak XT
Year Installed:
2012
Category
Characterization
Section
Engineering
Room Number:
L2 A645
Open to External Use?:
Yes
Operation:
User/Staff Operated
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Features

Step and Roughness (RMS) measurement Step height capabilities: from 10-20nm to 100μm Scan length: 50μm up to 100mm Stylus: 12.5μm radius Stylus force: 1 to 15mg Ultimate vertical resolution (range dependent): - 1Å at 6.5μm - 10Å at 65.5μm - 80Å at 524μm - 150Å at 1mm In reality, it depends on the local vibration/noise (±5nm).