Fabrication of the nanoparticle and silicon anode
In chamber 1, the nanoparticles, made from tantalum metal, are grown. Within this chamber, individual tantalum atoms clump together, similar to the formation of rain droplets. In chamber 2, the nanoparticles are mass filtered, removing ones that are too large or too small. In chamber 3, a layer of nanoparticles is deposited. This layer is then “sprayed” with isolated silicon atoms, forming a silicon layer. This process can then be repeated to create a multi-layered structure.